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J-GLOBAL ID:201302248696033613   Reference number:13A1293308

2インチSiC基板の紫外光支援研磨に関する研究

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Material:
Volume: 57  Issue:Page: 524-529  Publication year: Aug. 01, 2013 
JST Material Number: L0473A  ISSN: 0914-2703  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Materials of solid-state devices  ,  Manufacturing of ceramics and ceramic whiteware 
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