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J-GLOBAL ID:201302261747640745   Reference number:13A0868629

Adaptive Feedforward for a Wafer Stage in a Lithographic Tool

リソグラフィツールのウエハ段に対する適応フィードフォワード
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Volume: 21  Issue:Page: 875-881  Publication year: May. 2013 
JST Material Number: W0515A  ISSN: 1063-6536  CODEN: IETTE2  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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System design and analysis  ,  Hydrid integrated circuit 
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