Tohoku University Graduate School of Engineering Department of Mechanical Systems Engineering Functional Systems Engineering Micro-Nanomechanical Architectonics
About Tohoku University Graduate School of Engineering Department of Mechanical Systems Engineering Functional Systems Engineering Micro-Nanomechanical Architectonics
2024 - 2027 Magnetic resonance imaging of micro-sample at a standard temperature and pressure conditions
2020 - 2023 革新的な高機能・高信頼ダイヤンモンド MEMSの基盤構築と磁気センサの応用
2019 - 2022 Innovative spin detection with creative assembling with nanosensor and microsystem
2015 - 2019 Diamond NEMS logic for extrem environments
2015 - 2018 Development of nano/micro system using supercritical fluid
2014 - 2017 Development for early detection of apoptosis by high sensitive miniature magnetic resonance force measurement system
2016 - 2017 Development of an early detection technique of apoptosis by high sensitive magnetic resonance force measurement system(Fostering Joint International Research)
2013 - 2016 Femto watt thermal sensor
2013 - 2015 Narrow gap thermionic power generator
2012 - 2014 High sensitive probe for magnetic resonance force microscopy
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Papers (244):
Zilong Zhang, Keyun Gu, Guo Chen, Liwen Sang, Tokuyuki Teraji, Yasuo Koide, Satoshi Koizumi, Masaya Toda, Meiyong Liao. Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self-Recognition Algorithms. Advanced Materials Technologies. 2024. 9. 13
Ayumu Hinata, Takahito Ono, Masaya Toda. Water Evaporation-induced Power Generation Using Porous AZO Films. IEEJ Transactions on Sensors and Micromachines. 2024. 144. 7. 176-180
Zhijian Zhao, Masaya Toda, Takahito Ono. A resonant magnetic microsensor based on magnetic torque with piezoresistive readout. Applied Physics Letters. 2024. 124. 25
Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 2024. 1-4
Chuan Hui Ou, Nguyen Van Toan, Yao Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono. A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film. Journal of Microelectromechanical Systems. 2024. 33. 1. 46-53
戸田 雅也. 電子スピンによる磁気共鳴力顕微鏡3次元画像の妥当性の検討-Investigation of the validity of three-dimensional images of magnetic resonance force microscopy by electron spins-マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会 磁気センサ・ライフサイエンス応用センサに関連するセンシング技術の研究発表. 電気学会研究会資料. MAG = The papers of technical meeting on magnetics, IEE Japan / マグネティックス研究会 [編]. 2021. 2021. 151-168. 13-15
Masaya Toda, Masayuki Sohgawa, Minoru Sasaki. Preface to the Special Issue on “Sensors/Sensing Systems of IoT for Future”. IEEJ Transactions on Sensors and Micromachines. 2020. 140. 9. 221-221
Masaya Toda. Call for special issue on Sensor/Sensing Systems onf IoT for Future. IEEJ Transactions on Sensors and Micromachines. 2020. 140. 1. NL1_3-NL1_4
2021/04 - The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems Best Conference Paper Award
2018/11 - Institute of Electrical Engineers of Japan 第35回「センサ・マイクロマシンと応用システム」シンポジウム優秀技術論文賞 3.5 GHz band CMOS oscillator using thin film bulk acoustic resonator for atomic clock systems
2012/10 - International Microprocesses and Nanotechnology Conference Organizing Committee MNC 2011 Award for Most Impressive Presentation Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid
2005/11 - International Symposium on Surface Science and Nanotechnology Travel Award for Excellent Young Researchers based on the referee review Stress control on Si surface with ultraviolet light irradiation to plasma polymerized film
Association Membership(s) (4):
The Japan Society of Applied Physics
, The Japan Society of Mechanical Engineers
, The Institute of Electrical Engineers of Japan
, IEEE