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J-GLOBAL ID:201402295234759940   Reference number:14A0427623

4インチSiC基板のUVアシスト研磨に関する研究

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Volume: 58  Issue:Page: 235-240  Publication year: Apr. 01, 2014 
JST Material Number: L0473A  ISSN: 0914-2703  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing of ceramics and ceramic whiteware  ,  Materials of solid-state devices 
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