Art

J-GLOBAL ID：201502221326299649   Reference number：15A1314792

Effects of N₂O gas addition on the properties of ZnO films grown by catalytic reaction-assisted chemical vapor deposition

触媒反応支援化学蒸着により成長したZnO膜の特性に対するN₂Oガス添加の効果

Author (6)： YASUI Kanji (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...) ,  MORIOKA Makoto (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...) ,  KANAUCHI Shingo (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...) ,  OHASHI Yuki (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...) ,  KATO Takahiro (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...) ,  TAMAYAMA Yasuhiro (Dep. of Electrical, Electronic, and Information Engineering, Nagaoka Univ. of Technol., 1603-1 Kamitomioka, Nagaoka ...)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 33  Issue： 6  Page： 061519-061519-5  Publication year： Nov. 2015 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *zinc oxide ,  substrate(plate) ,  compound semiconductor ,  dinitrogen oxide ,  nano particle ,  *chemical vapor deposition ,  facet ,  crystal orientation ,  *carrier mobility ,  *photoluminescence ,  FWHM ,  exciton
Semi thesaurus term： sapphire substrate ,  dinitrogen momoxide ,  oxide semiconductor ,  *electron mobility ,  platinum nanoparticle

JST classification (3)： Oxide thin films  (BK14050P) ,  Electric conduction in crystalline semiconductors  (BM03043X) ,  Luminescence of semiconductors  (BM08092S)

Substance index (1)： Dimethylzinc

Terms in the title (6)： 触媒反応 ,  支援 ,  化学蒸着 ,  成長 ,  ZnO ,  N2O