Art
J-GLOBAL ID:201702225120777088   Reference number:17A0643116

Suppression of heavy-ion irradiation induced parasitic bipolar effects in short channel SOI devices

微細SOIデバイスの重イオン照射誘起寄生バイポーラ効果抑制
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Volume: 39  Issue:Page: 145-153  Publication year: May. 01, 2017 
JST Material Number: L2778A  ISSN: 0919-2697  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Transistors  ,  Interactions with ions 
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