Art

J-GLOBAL ID：201702227069845467   Reference number：17A0861674

Effects of mixing Al₂O₃ particles with tin-doped indium oxide particles on the properties of aerosol-deposited thin films

エアロゾルデポジション薄膜の特性に及ぼすAl₂O₃粒子と錫ドープ酸化インジウム粒子の混合の効果

Author (3)： HASEGAWA Yutaka (Graduate School of Science and Engineering, Doshisha University) ,  SATO Yuuki (Graduate School of Science and Engineering, Doshisha University) ,  YOSHIKADO Shinzo (Graduate School of Science and Engineering, Doshisha University)
Material： Journal of the Ceramic Society of Japan (Web)  (J Ceram Soc Jpn (Web))
Volume： 125  Issue： 6  Page： 482-486(J-STAGE)  Publication year： 2017 
JST Material Number： U0409A  ISSN： 1348-6535  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Abstract/Point： Tin-doped indium oxide (ITO) t...

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Thesaurus term： *vapor deposition ,  *aerosol(suspended solids) ,  *alumina ,  *indium oxide ,  *tin ,  doping ,  *mixture ,  *nano particle ,  *thin film ,  *composite material ,  percolation ,  glass ,  polyvinyl chloride ,  substrate(plate) ,  film thickness ,  electrical resistivity ,  absorption coefficient ,  *electrical property ,  *optical property ,  X-ray diffractometry ,  energy dispersive X-ray spectrometry ,  scanning electron microscope
Semi thesaurus term： *aerosol deposition method ,  element distribution ,  absorption coefficient

Author keywords (6)： Aerosol deposition ,  Tin-doped indium oxide ,  Al₂O₃ ,  Composite ,  Thin film ,  Percolation

JST classification (2)： Oxide thin films  (BK14050P) ,  Properties of ceramics and ceramic whiteware  (YC03030G)

Reference (17)：

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• 3) J. Akedo and M. Lebedev, Materia Japan, 41, 459–466 (2002).
• 4) J. Akedo and M. Lebedev, Jpn. J. Appl. Phys., 38, 5397–5401 (1999).
• 5) Y. Uemichi, J. Takino, K. Nishikawa, Y. Sato and S. Yoshikado, J. Aust. Ceram. Soc., 48, 64–68 (2012).

Terms in the title (4)： エアロゾルデポジション ,  薄膜 ,  Al2O3 ,  錫ドープ酸化インジウム