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Fabrication of inverted pyramidal pits with Nano-opening by laser interference lithography and wet etching
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About Quan Baogang
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Yao Zehan
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Sun Weijie
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Liu Zhe
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Xia Xiaoxiang
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Gu Changzhi
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
About Li Junjie
About Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
Material：
About Microelectronic Engineering
Volume： 163 Page： 110-114 Publication year： 2016
JST Material Number： C0406B ISSN： 0167-9317 CODEN： MIENEF Document type： Article
Article type： 原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)
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About Gold
About wet etching
About nanostructure
About opening
About film thickness
About pyramid
About circular cone
About three dimension
About blue shift
About optical property
About plasmon
About production process
About reflection spectrum
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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About ホールアレイ
About レーザ干渉リソグラフィー
Category name(code) classified by JST.
About Manufacturing technology of solid-state devices
Keywords automatically extracted from the title.
About レーザ干渉リソグラフィー
About 湿式エッチング
About ピラミッド
About ピット
About 作製
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