Research theme for competitive and other funds (5):
2016 - 2019 Development of plasma sputtering device for paramagnetic and low melting point metal target
2014 - 2016 High speed and high aspect ratio reactive ion etching by using high density and ion orbit controlled plasma
2011 - 2015 Active Laser-induced Fluorescence Method using Femtosecond Laser
2013 - 2014 強磁性体ステージを有する高速ヘリコンプラズマエッチング源
2010 - 2011 短軸長の高密度ヘリコンプラズマ源開発と高速プラズマ流制御の先進研究
Papers (36):
Kenshin Takemura, Taisei Motomura, Wataru Iwasaki, Nobutomo Morita. Fabrication of Highly Active Nanoneedle Gold Electrode Using Rose Petals for Electrochemical Detection of Arsenic(III). ACS Applied Nano Materials. 2023. 6. 17. 15879-15886
Taisei Motomura, Kenshin Takemura, Toshimi Nagase, Nobutomo Morita, Tatsuo Tabaru. Suppression of substrate temperature in DC magnetron sputtering deposition by magnetic mirror-type magnetron cathode. AIP Advances. 2023. 13. 2
Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi, Takashi Matsumae, Mitsuhiro Watanabe, Hideki Takagi. High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps. Sensors. 2023
Taisei Motomura, Tatsuo Tabaru, Masato Uehara. Substrate temperature dependence of GaN film deposited on sapphire substrate by high-density convergent plasma sputtering device. Journal of Vacuum Science & Technology A. 2022
Kenshin Takemura, Taisei Motomura, Wataru Iwasaki, Naoki Matsuda. Metal deposition and shape reproduction at biological temperatures on cell-level samples. Scientific reports. 2022. 12. 1. 13328-13328
Motomura Taisei, Tabaru Tatsuo, Uehara Masato. Low temperature deposition of c-axis oriented gallium nitride films using high-density convergent plasma sputtering device. Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science. 2021. 2021. 2Ca09Y
Plasma Sputtering Using Liquid Metal Target. プラズマ・核融合学会誌 = Journal of plasma and fusion research. 2020. 96. 12. 695-700
The Japan Sociey of Applied Physics
, The Japan Society of Vacuum and Surface Science
, エレクトロニクス実装学会
, The Japan Society of Plasma Science and Nuclear Fusion Research