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J-GLOBAL ID：201902220953022915   Reference number：19A1415851

Enhanced nickelidation rate in silicon nanowires with interfacial lattice disorder

界面格子無秩序性を有するシリコンナノワイヤにおける増強されたニッケル化速度【JST・京大機械翻訳】

Author (10)： Hashimoto Shuichiro (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan) ,  Yokogawa Ryo (School of Science and Technology, Meiji University, Tama, Kawasaki 214-8571, Japan) ,  Oba Shunsuke (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan) ,  Asada Shuhei (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan) ,  Xu Taiyu (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan) ,  Tomita Motohiro (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan) ,  Ogura Atsushi (School of Science and Technology, Meiji University, Tama, Kawasaki 214-8571, Japan) ,  Matsukawa Takashi (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan) ,  Masahara Meishoku (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan) ,  Watanabe Takanobu (Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 122  Issue： 14  Page： 144305-144305-7  Publication year： 2017 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： We demonstrate that the nickel...

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Thesaurus term： oxide ,  oxidation ,  silicon dioxide ,  *interface(surface) ,  annealing(heat treatment) ,  reaction rate ,  electron beam lithography ,  Raman spectroscopy
Semi thesaurus term： 分子動力学シミュレーション ,  圧縮歪 ,  一酸化ケイ素 ,  *シリコンナノワイヤ , 【Automatic Indexing@JST】

JST classification (2)： Solid phase transitions  (BL04020G) ,  Thermal and statistical properties of lattice vibrations  (BL03050G)

Terms in the title (6)： 界面 ,  格子 ,  無秩序性 ,  シリコンナノワイヤ ,  増強 ,  ニッケル