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J-GLOBAL ID:201902233677762644   Reference number:19A1565923

Development of Electrostatic-type Aberration Corrector with Annular and Circular Electrodes for SEMs

SEM用の環状および円形状電極による静電タイプ収差補正の開発
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Volume:Page: 64-65  Publication year: Jun. 2019 
JST Material Number: L7013A  ISSN: 1882-9465  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Electron and ion microscopes 
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