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大口径化にむけた機械学習によるSiC溶液成長の最適成長条件の決定
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Material：
About 応用物理学会春季学術講演会講演予稿集(CD-ROM)
Volume： 66th Page： ROMBUNNO.11p-70A-4 Publication year： Feb. 25, 2019
JST Material Number： Y0054B ISSN： 2758-4704 Document type： Proceedings
Article type： 短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)
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About large diameter
About Machine Learning
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About SiC
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About Crystal growth of semiconductors
About Artificial intelligence
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About 大口径
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About SiC
About 溶液成長
About 成長条件
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