Nanotechnology -Integrated Processing Systems for Ultra-precision and Ultra-fine Products- (Edited by N. Tanuguchi)
Oxford University Press 1996
講演・口頭発表等 (5件)：
"Ultra thin diamond-like carbon film mechanical resonator fabrication by a combined process of FIB-CVD and wet-etching" (R. Kometani, S. Warisawa, S. Ishihara)
(The 36th International Conference on Micro and Nano Engineering (MNE2010), Genova, Italy, Sep. 21 2010)
Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment (H. Shimizu, J.-J. Delaunay, R. Kometani, S. Warisawa and S. Ishihara)
(22nd International Microprocesses and Nanotechnology Conference (MNC2009), Sheraton Sapporo Hotel, Sapporo, Japan, Nov. 18 2009)
Vibration Characteristics- TunableResonator Fabrication by Focused-Ion-Beam Chemical Vapor Deposition (S. Nishi, R. Kometani, S. Warisawa and S. Ishihara)
(the 22nd International Microprocesses and Nanotechnology Conference (MNC2009), Sheraton Sapporo Hotel, Sapporo, Japan, Nov. 18 2009)
High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators (N. Kitajima, H. Okamoto, T. Kamada, K. Onomitsu, S. Warisawa, S. Ishihara and H. Yamaguchi)
(22nd International Microprocesses and Nanotechnology Conference (MNC2009), Sheraton Sapporo Hotel, Sapporo, Japan, Nov. 18 2009)
Dynamic characterization method of GaAs membrane resonator by direct excitation using scanning probe microscopy (K. Tamaru, K. Nonaka, M. Nagase, H. Yamaguchi, R. Kometani, S. Warisawa, S. Ishihara)
(The35th International Conference on Micro & Nano Engineering (MNE2009), Ghent, Belgium, Sept. 29 2009)
