Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009)
Driving Characteristic of an Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror and a High Dielectric Constant Layer
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009)
Fabrication Process Improvement of Optical MEMS Switch Using a Belt-shaped Thin Film Mirror
(3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology 2009)
Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009)
Driving Characteristic of an Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror and a High Dielectric Constant Layer
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009)