研究キーワード (7件):
Microfabrication
, Sensor
, PowerMEMS
, Energy harvesting
, Piezoelectric thin films
, Piezoelectric devices
, MEMS
競争的資金等の研究課題 (3件):
2021 - 2024 イオン液体をイオン種としたマルチ集束イオンビームの研究
2020 - 2022 Ultra-high performance and environment-friendly micro-energy harvesters towards self-powered micro/nano-systems for the Internet of Things
2016 - 2020 高機能ナノ自由加工を目指すマルチ集束イオンビーム開発
論文 (28件):
Le Van Minh, Hiroki Kuwano. Piezoelectric Tantalum Aluminum Nitride Films for Vibrational Micro Energy Harvesters. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-. 242-245
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano. Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-January. 14-17
Qiu Zheng, Le Van Minh, Hung Hoang Nguyen, Hiroki Kuwano. Mechanical fatigue analysis of AlN/SUS430/AlN heterolayered foils in micromachined devices. Sensors and Materials. 2020. 32. 7. 2463-2473
H. H. Nguyen, L. Van Minh, H. Kuwano. High-rate etching of single oriented AlN films by chlorine-based inductive coupled plasma for vibrational energy harvesters. Journal of Physics: Conference Series. 2019. 1407. 1
N. Moriwaki, L. V. Minh, H. Kuwano. Highly Oriented and Stress Modified Thick AlN Films Deposited on Low Thermal Expansion Alloy Substrates for Flexible Electronics in Harsh Environment. Journal of Physics: Conference Series. 2019. 1407. 1
Piezoelectric Tantalum aluminum nitride grown on stainless steel for low-frequency vibration-driven energy harvesters
(The 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), USA 2022)
Piezoelectric wurtzite nitride thin films for green, high-performance MEMS applications
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
Vibration-driven micro energy harvesting with piezoelectric materials for IoTs and SDGs
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
EMIM-BF4 multi-ion sources of micromachined Si external wetted emitters with fluidic feeding-flow confinement: from microfabrication to Si etching evaluation
(The 69th Japanese Society of Applied Physics (JSAP) Spring Meeting 2022, Kanagawa, Japan 2022)
A micromachined ionic liquid ion source array
(The 3rd International Workshop on MEMS and Sensor System 2019 (IWMS 2019) 2019)
2010 - 2013 Tohoku University Graduate Schoool of Engineering Nanomechanics
2006 - 2008 Hanoi University of Technology International Training Institute for Materials Science Materials Science
2001 - 2006 Hanoi University of Technology Institute of Engineering Physics Engineering Physics - Electronic Materials
経歴 (8件):
2022/04 - 現在 東北大学 未来科学技術共同研究センター 特任准教授(研究)
2017/04 - 2022/03 東北大学 未来科学技術共同研究センター 助教
2016/04 - 2017/03 東北大学 大学院工学研究科 ロボティクス専攻 助教
2015/06 - 2016/03 東北大学 大学院工学研究科 助教
2014/10 - 2015/05 東北大学 未来科学技術共同研究センター 産学官連携研究員
2014/01 - 2014/09 東北大学 未来科学技術共同研究センター 教育研究支援者
2013/10 - 2013/12 東北大学 産学官連携研究員
2006/07 - 2010/09 Hanoi University of Technology International Training Institute for Materials Science, MEMS group Research Assistant
全件表示
受賞 (2件):
2010/10 - Japanese Government (Monbukagakusho: MEXT) Japanese Government (Monbukagakusho: MEXT) Scholarship for PhD. Program (2010-2013)
2010 - The Vietnam Education Foundation (VEF) The Vietnam Education Foundation (VEF) Fellowship for Doctoral Course in the United States of America (Awarded list in 2010)
所属学会 (4件):
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society Membership
, IEEE Electron Devices Society Membership
, IEEE
, The Japan Society of Applied Physics (JSAP)