Takashi Izawa, Takashi Sasaki, Kazuhiro Hane. Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity. Micromachines. 2017. 8. 8. 240(13pp)
Eyeglasses-Type Retinal Imaging System Using MEMS Scanner
(IEEE NANO 2016 2016)
Tunable Monocrystalline Silicon Grating on LSI Circuit Fabricated by Two-step Polymer Bonding
(Optical MEMS and Nanophotonics 2016 2016)
GaN Mechanical Resonators on Silicon Substrate Fabricated by Two-Step Polymer Bonding
(IEEE-NEMS 2016 2016)
Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit
(International Conference on Optical MEMS and Nanophotonics 2015 2015)
LARGE-AMPLITUDE RESONANT VARIFOCAL MIRROR WITH AN ACOUSTIC CAVITY
(18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015)