Research field (3):
Electronic devices and equipment
, Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research keywords (8):
低誘電率薄膜
, 冷陰極
, 半導体材料の育成と評価
, 半導体表面の改質
, Low K film
, cold cathode
, Growth and Characterization of Semiconducing Materials
, Modification of Semiconductor Surfaces