Matsumura Ryo

マツムラリョウ | Matsumura Ryo

Affiliation and department：
Job title： Senior Researcher

Research field (1)： Electric/electronic material engineering

Research keywords (3)：結晶成長 , Electronic Device , Semiconductor

Research theme for competitive and other funds (8)：

2023 - 2026 Crystal growth of Ge-based optical materials on insulating films for optoelectronic fusion LSI and their application to optoelectronic devices
2021 - 2025 Development of vertical HEMT-type devices using Si-Ge core-shell heterojunction nanowires
2020 - 2023 Realize of GeSn/Ge vertical nanowire and its application to next generation transitor
2021 - 2022 レーザーアニールを用いたGeSn結晶薄膜の非熱平衡成長とトランジスタ応用
2020 - 2021 Research of GeSn Nanowire Transistor

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Papers (64)：

Rahmat Hadi Saputro, Tatsuro Maeda, Kaoru Toko, Ryo MATSUMURA, Naoki Fukata. High Doping Activation (≥10²⁰ cm^-3) in Tensile-Strained n-Ge Alloys Achieved by High-Speed Continuous-Wave Laser Annealing. ACS Applied Electronic Materials. 2024
Rahmat Hadi Saputro, Tatsuro Maeda, Ryo Matsumura, Naoki Fukata. Highly strained and heavily doped germanium thin films by non-equilibrium high-speed CW laser annealing for optoelectronic applications. Materials Science in Semiconductor Processing. 2023
Qinqiang ZHANG, Ryo MATSUMURA, Naoki Fukata. Synthesis of Large-Area GeS Thin Films with the Assistance of Pre-deposited Amorphous Nanostructured GeS Films: Implications for Electronic and Optoelectronic Applications. ACS Applied Nano Materials. 2023
Ryo Matsumura, Naoki Fukata. Direct Detection of Free H2Outgassing in Blisters Formed in Al2O3Atomic Layers Deposited on Si and Methods of Its Prevention. ACS Applied Materials and Interfaces. 2022. 14. 1. 1472-1477
Ryo Matsumura, Naoki Fukata. Formation of Free Hydrogen Gas By Annealing ALD-Al2O3/Si Stacked Structure. ECS Transactions. 2022. 108. 5. 57-61

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MISC (4)：

S. Takagi, D. H. Ahn, T. Gotow, K. Nishi, T. E. Bae, T. Katoh, R. Matsumura, R. Takaguchi, K. Kato, M. Takenaka. III-V/Ge-based tunneling MOSFET. 2017 5th Berkeley Symposium on Energy Efficient Electronic Systems, E3S 2017 - Proceedings. 2018. 2018-. 1-3
Takagi Shinichi, Kim Wu-Kang, Jo Kwang-Won, Matsumura Ryo, Takaguchi Ryotaro, Katoh Takumi, Bae Tae-Eon, Kato Kimihiko, Takenaka Mitsuru. Ultrathin-Body Ge-on-Insulator Mosfet and TFET Technologies. Meeting Abstracts. 2018. 86. 31. 1042-86
Sakai Takatsugu, Matsumura Ryo, Sadoh Taizoh, Miyao Masanobu. Low-Temperature Formation of Sn-Doped Ge on Insulating Substrates by Metal-Induced Crystallization. Meeting Abstracts. 2016. 33. 2130
MATSUMURA Ryo, SADOH Taizoh, MIYAO Masanobu. Formation of laterally-graded Ge based hetero-structure. Technical report of IEICE. OME. 2013. 113. 18. 17-23

Lectures and oral presentations (11)：

Analysis and control of Si segregation phenomena to achieve uniform-SiGe crystals on insulator by rapid-melting growth
(2015 International Electron Devices and Materials Symposium, IEDMS 2015 2015)
Segregation-Controlled Rapid-Melting Growth for Sige-on-Insulator with Uniform Lateral Composition
(24th International Materials Research Congress, IMRC2015 2015)
Low Temperature (<200oC) position controlled Solid Phase Crystallization of GeSn combined with Laser Anneal Seeding
(ICSI 9 2015)
Low-Temperature Crystallization of a-GeSn on Insulating Films for Next-Generation Flexible Electronics(1) Characteristics of Solid Phase Crystallization
(2014 International Electron Devices and Materials Symposium, IEDMS 2014 2014)
Segregation-Controlled Rapid-Melting Growth for Large-Grain and Uniform -Composition SiGe on Insulator” (JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration
(JSPS-imec 2014 2014)

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Education (3)：

2013 - 2016 Kyushu University Graduate School and Faculty of Information Science and Electrical Engineering Department of Electrical Engineering
2011 - 2013 Kyushu Unviersity Graduate School and Faculty of Information Science and Electrical Engineering Department of Electrical Engineering
2006 - 2011 Kyushu University School of Engineering Department of Electrical Engineering and Computer Science

Professional career (1)：

Work history (5)：

2023/04 - 現在 National Institute for Materials Science Research Center for Materials Nanoarchitectonics Senior Reseacher
2017/04 - 2023/03 National Institute for Materials Science MANA Researcher
2016/04 - 2017/03 JSPS Research Fellow SPD
2014/04 - 2016/03 JSPS Research Fellow DC2
2013/04 - 2014/03 九州電気専門学校非常勤講師

Committee career (5)：

Awards (5)：

2024/01 - IUMRS Silver Award, MRM/IUMRS2023
2016/03 - Kyushu University Student Award
2016 - International Conference on Solid State Devices and Materials (SSDM) Young Researcher Award
2015/12 - 2015 International Electron Devices and Materials Symposium (IEDMS2015) Best Paper Award
2013 - 5th Semiconductor Materials and Device Forum Presentation Award

Association Membership(s) (1)：

THE JAPAN SOCIETY OF APPLIED PHYSICS

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