Rchr
J-GLOBAL ID:200901029863117077   Update date: Aug. 29, 2020

Fukuda Yukio

フクダ ユキオ | Fukuda Yukio
Research field  (2): Optical engineering and photonics ,  Thin-film surfaces and interfaces
Research keywords  (2): diffractive optics ,  Properties and characterization of Ge MIS interface
Research theme for competitive and other funds  (2):
  • 2005 - 高品質絶縁膜/Ge界面の低温形成技術に関する研究
  • 2005 - Study on the low-temperature formation of high-quality Ge/insulator interfaces
Papers (103):
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MISC (29):
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Books (1):
  • Properties of Gallium Arsenide (2nd edition)
    The Institute of Electrical Engineering 1990
Lectures and oral presentations  (79):
  • REALD形成Al2O3/GeO2/p-GeMOSキャパシターの電気的特性に及ぼすゲート電極金属の影響
    (第77回応用物理学会秋季学術講演会 2016)
  • Effects of gate-electrode metals and postdeposition treatments on the electrical properties of Al2O3/GeO2 gate stack grown on Ge substrate by radical-enhanced atomic layer deposition
    (ALD 2016 Ireland 2016)
  • ラジカル援用原子層堆積法で形成したAl2O3/GeO2/p-Ge構造上のゲート電極金属が電気的特性に及ぼす影響
    (応用物理学会 北陸・信越支部 第3回有機・無機エレクトロニクスシンポジウム 2016)
  • Radical-enhanced ALD法によるGe-MIS構造の欠陥評価(2): 熱処理効果
    (第63回応用物理学会春季学術講演会 2016)
  • Effects of postdeposition treatments on the electrical properties of Al2O3/GeO2 gate stack grown on Ge substrate by radical-enhanced atomic layer deposition
    (9th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 2016)
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Professional career (1):
  • Doctor of Engineering (Tohoku University)
Work history (4):
  • 2003/04 - Tokyo University of Science, Suwa Professor
  • 2001/07 - 2003/03 Tokyo Electron, Technology Development Center Senior manager
  • 1991/03 - 2001/06 Texas Instruments Tsukuba R&D Center Branch Manager
  • 1977/04 - 1991/02 NTT Laboratories Senior Researcher
Committee career (6):
  • 2001/01 - 2002/12 応用物理学会 応用物理学会論文賞選考委員会委員
  • 2000/04/01 - 2002/03/31 Japanese Journal of Applied Physics 学会誌及び論文誌の編集者
  • 2000/11 - 2001/10 電気学会 誘電体薄膜材料調査専門委員会委員
  • 1998/04 - 2000/03 応用物理学会 講演会薄膜・表面分科代表世話人及び講演会企画運営委員
  • 1996/04 - 2000/03 応用物理学会 講演会薄膜・表面分科世話人
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Awards (2):
  • 2013/07/12 - The 12th International Symposium on Sputtering & Plasma Process The Best Poster Award
  • 1985/06/05 - National Invention Awards, The Asahi Shinbun Prize
Association Membership(s) (4):
電気学会 ,  応用物理学会 ,  Japanese Journal of Applied Physics ,  The Institution of Electrical Engineers
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