Measurement of Nanodefects on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method.

SASAKI SATOSHI; AN HIROSHI; MORI YUZO; KATAOKA TOSHIHIKO; ENDO KATSUYOSHI; YAMAUCHI KAZUTO; INOUE HARUYUKI

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J-GLOBAL ID：200902183128717721 Reference number：02A0726777

Measurement of Nanodefects on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method.

ナノパーティクル測定機によるシリコンウエハ面のナノ欠陥計測

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Material：
Volume： 68 Issue： 9 Page： 1200-1205 Publication year： Sep. 05, 2002
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measurement,testing and reliability of solid-state devices , Optical instruments and techniques in general

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