About HORITA Susumu
About Japan Advanced Inst. of Sci. and Technol., Ishikawa, JPN
About Japanese Journal of Applied Physics
About low temperature
About Ammonia
About annealing (heat treatment)
About silicon oxide
About oxide film
About removal
About FTIR spectroscopy
About gas
About Lewis base
About nitrogen gas
About conversion coating film
About annealing treatment
About Catalysis
About Oxide thin films
About 低温
About アンモニアガス
About アニーリング
About 低温酸化
About ケイ素膜
About 高効率