Kimura Takashi

キムラタカシ | Kimura Takashi

Affiliation and department：
Job title： Associate Professor
Homepage URL (1)： http://plasma.web.nitech.ac.jp/

Research field (1)： Basic plasma science

Research keywords (1)： -

Research theme for competitive and other funds (2)：

Papers (71)：

ｍore...

Lectures and oral presentations (25)：

Preparation of TiN films by reactive high power pulsed sputter Penning-type discharges
(39th Internatioal Symposium on Dry Process 2017)
Plasma Based Nitrogen Ion Implantation to Hydrogenated Diamond-like Carbon Films
(11th Asian-European International Conference on Plasma Surface Engineering 2017)
対向タ-ゲット型反応性HPPSによるTiCN膜の作製
(第78回応用物理学会秋季学術講演会 2017)
ホロ-形状ターゲットを持つ高電力パルススパッタの電気特性
(第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム 2017)
Surface Modification of DLC Films by Plasma Based Nitrogen Ion Implantation Method
(日本MRS年次大会 2016)

ｍore...

Committee career (1)：

※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

Return to Previous Page