Art
J-GLOBAL ID：200902116040699180
Reference number：99A0245607
Fabrication of Microcantilever with a Silicon Tip Prepared by Anodization.
陽極処理で形成されたシリコンチップからなるマイクロカンチレバーの製作
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Author (2)：
,
Material：
Volume：
37
Issue：
12B
Page：
7078-7080
Publication year：
Dec. 1998
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
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