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Art
J-GLOBAL ID：200902120204720832
Reference number：02A0466711 高誘電率ゲート用ZrO2およびPrOx薄膜の作製と評価
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SOGAWA MASAHIRO
About SOGAWA MASAHIRO
(大阪大 基礎工)
, About 大阪大 基礎工
KITAI SATOSHI
About KITAI SATOSHI
(大阪大 基礎工)
, About 大阪大 基礎工
KANDA HIROFUMI
About KANDA HIROFUMI
(大阪大 基礎工)
, About 大阪大 基礎工
KANESHIMA TAKESHI
About KANESHIMA TAKESHI
(大阪大 基礎工)
, About 大阪大 基礎工
FUJIMOTO AKIRA
About FUJIMOTO AKIRA
(和歌山工高専)
, OKUYAMA MASANORI
About OKUYAMA MASANORI
(大阪大 基礎工)
About 大阪大 基礎工
Material：
応用物理学関係連合講演会講演予稿集
(Extended Abstracts. Spring Meeting. Japan Society of Applied Physics and Related Societies)
About 応用物理学関係連合講演会講演予稿集
Volume： 49th Issue： 2 Page： 829 Publication year： Mar. 27, 2002
JST Material Number： Y0054A Document type： Proceedings
Article type： 短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*gate (semiconductor)
,...
About gate (semiconductor)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
PLD【蒸着】
About PLD【蒸着】
JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films
Category name(code) classified by JST.
(BK14050P)
, Transistors
About Oxide thin films
(NC03070N)
About Transistors
Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
高誘電率
, About 高誘電率
ゲート
, About ゲート
ZrO2
, About ZrO2
薄膜
, About 薄膜
作製
, About 作製
評価
About 評価
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