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J-GLOBAL ID:200902126295642225   Reference number:02A0440656

IV族混晶半導体Si1-yCyにおけるCの熱的安定性

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Volume: 49th  Issue:Page: 412  Publication year: Mar. 27, 2002 
JST Material Number: Y0054A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films 
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