Art

J-GLOBAL ID：200902134363222216   Reference number：95A0262282

Special Issue on Micromachines and Micro Electro Mechanical Systems. Scanning Force Microscope Using Piezoelectric Excitation and Detection.

ピエゾ電気励起と検出を使った走査力顕微鏡

Author (3)： ITOH T (Univ. Tokyo, Tokyo, JPN) ,  OHASHI T (Univ. Tokyo, Tokyo, JPN) ,  SUGA T (Univ. Tokyo, Tokyo, JPN)
Material： IEICE Transactions on Electronics (Institute of Electronics, Information and Communication Engineers)  (IEICE Trans Electron (Inst Electron Inf Commun Eng))
Volume： E78-C  Issue： 2  Page： 146-151  Publication year： Feb. 1995 
JST Material Number： L1370A  ISSN： 0916-8524  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： force microscope ,...

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JST classification (1)： Electron and ion microscopes  (BD02050B)

Reference (17)：

• BINNIG, G. Atomic Force Microscope. Phys. Rev. Lett. Mar., vol.56, no.9, 930-933
• BINNIG, G. Atomic Resolution with Atomic Force Microscope. Europhys. Lett. Jun., vol.3, no.12, 1281-1289
• WOLTER, O. Micromachined silicon sensors for scanning force microscopy. J. Vac. Sci. Technol. Mar., vol.B9, no.2, 1353-1357
• AKAMINE, S. Low temperature thermal oxidation sharpening of microcast of microcast tips. J. Vac. Sci. Technol. Sep., vol.B10, no.5, 2307-2310
• Nanoprobe-Etched Silicon Atomic Force Microscope Probes

Terms in the title (3)： ピエゾ電気 ,  励起 ,  走査力顕微鏡