Preparation of Co and CoN<sub>x</sub> thin films by unbalanced radio frequency magnetron sputtering.

TANAKA T; KAWABATA K; KITABATAKE A

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J-GLOBAL ID：200902137280486245 Reference number：00A0729107

Preparation of Co and CoN_x thin films by unbalanced radio frequency magnetron sputtering.

アンバランス高周波マグネトロンスパッタリングによるCo及びCoN_x薄膜の作製

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Volume： 18 Issue： 4,Pt.2 Page： 1649-1652 Publication year： Jul. 2000
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Metallic thin films , Thin films of other inorganic compounds

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Preparation of Co and CoNx thin films by unbalanced radio frequency magnetron sputtering.

Preparation of Co and CoN_x thin films by unbalanced radio frequency magnetron sputtering.