Detection of Light Scattered by Particles on Silicon Wafer Deposited with SiO<sub>2</sub> Thin Film.

AKIYAMA NOBUYUKI; SUZUKI TOSHIAKI; KAWADA KENJI; YOSHIDA MASAHIRO; YATSUGAKE YASUO

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J-GLOBAL ID：200902137362154615 Reference number：02A0375467

Detection of Light Scattered by Particles on Silicon Wafer Deposited with SiO₂ Thin Film.

SiO₂薄膜付きウエハ上微粒子からの散乱光検出

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Volume： 68 Issue： 4 Page： 531-535 Publication year： Apr. 05, 2002
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Manufacturing technology of solid-state devices

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Detection of Light Scattered by Particles on Silicon Wafer Deposited with SiO2 Thin Film.

Detection of Light Scattered by Particles on Silicon Wafer Deposited with SiO₂ Thin Film.