Art
J-GLOBAL ID：200902144769610883   Reference number：97A0939673

Development of Detection System for Small Particles with Oblique Illumination and Oblique Detection.

斜方照明・斜方検出による微粒子検出装置の開発
Author (3)：
AKIYAMA NOBUYUKI

About AKIYAMA NOBUYUKI

(長岡技科大)

About 長岡技科大

, 
ITO TAKUMI

About ITO TAKUMI

(長岡技科大 大学院)

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, 
MASUYA KAZUHIRO

About MASUYA KAZUHIRO

(長岡技科大 大学院)

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Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 63  Issue： 10  Page： 1444-1448  Publication year： Oct. 1997 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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fine particle

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,...
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Thesaurus term/Semi thesaurus term
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ITO(solid solution)

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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
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照明

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, 
粒子検出装置

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, 
開発

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