Art
J-GLOBAL ID：200902164468755151   Reference number：00A0690153

Mechanical Properties of Silicon Nitride Films Deposited on Stainless Steel Plate by Reactive Arc Ion Plating.

アークイオンプレーティング法により作製した窒化ケイ素薄膜の特性
Author (3)：
ISHIKAWA HIROMI

About ISHIKAWA HIROMI

(千葉県機械金属試)

About 千葉県機械金属試

, 
FUDETANI SHUICHI

About FUDETANI SHUICHI

(千葉大 大学院)

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, 
HIROHASHI MITSUJI

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(千葉大 工)

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Material：
表面技術  (Journal of the Surface Finishing Society of Japan)

About 表面技術


Volume： 51  Issue： 7  Page： 740-744  Publication year： Jul. 01, 2000 
JST Material Number： G0441B  ISSN： 0915-1869  CODEN： HYGIEX  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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vacuum arc

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,...
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pressure dependence

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JST classification (1)：
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Ceramic coating to metallic materials 
(YC02050V)

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Reference (15)：
ｍore...
Terms in the title (4)：
Terms in the title
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アークイオンプレーティング法

About アークイオンプレーティング法

, 
作製

About 作製

, 
窒化

About 窒化

, 
ケイ素薄膜

About ケイ素薄膜


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