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J-GLOBAL ID:200902164468755151   Reference number:00A0690153

Mechanical Properties of Silicon Nitride Films Deposited on Stainless Steel Plate by Reactive Arc Ion Plating.

アークイオンプレーティング法により作製した窒化ケイ素薄膜の特性
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Volume: 51  Issue:Page: 740-744  Publication year: Jul. 01, 2000 
JST Material Number: G0441B  ISSN: 0915-1869  CODEN: HYGIEX  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Ceramic coating to metallic materials 
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