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J-GLOBAL ID：200902176453380338
Reference number：02A0849697 1,3-ジシラブタンをCソースに用いた微結晶Si1-xCx薄膜の作製
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OKABAYASHI TAKASHI
About OKABAYASHI TAKASHI
(東京工大 大学院)
, About 東京工大 大学院
YAGI SHUHEI
About YAGI SHUHEI
(東京工大 大学院)
, About 東京工大 大学院
ABE KATSUYA
About ABE KATSUYA
(東京工大 大学院)
, About 東京工大 大学院
YAMADA AKIRA
About YAMADA AKIRA
(東京工大 大学院)
, About 東京工大 大学院
KONAGAI MAKOTO
About KONAGAI MAKOTO
(東京工大 大学院)
About 東京工大 大学院
Material：
応用物理学会学術講演会講演予稿集
(Extended Abstracts. Annual Meeting. Japan Society of Applied Physics)
About 応用物理学会学術講演会講演予稿集
Volume： 63rd Issue： 2 Page： 833 Publication year： Sep. 24, 2002
JST Material Number： Y0055A Document type： Proceedings
Article type： 短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*silicon carbide
,...
About silicon carbide
JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
Category name(code) classified by JST.
(BK14040E)
About Semiconductor thin films
Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Chemical Substance indexed to the Article.
1,3-Disilabutane
About 1,3-Disilabutane
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
ソース
, About ソース
薄膜
, About 薄膜
作製
About 作製
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