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J-GLOBAL ID:200902212580732584   Reference number:09A0598706

Auto Focus and Leveling Control of Large-Scale High-Precision Scan-Stage Using Driving Force and Surface Shape of the Stage

ステージ駆動力と表面形状を用いた大型超精密スキャンステージのオートフォーカス/レベリング制御
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Volume: 129  Issue:Page: 564-570 (J-STAGE)  Publication year: 2009 
JST Material Number: X0451A  ISSN: 0913-6339  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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Control applications in general 
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