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J-GLOBAL ID：200902218995185528
Reference number：03A0523210 Spectral dynamics of narrow-band F2 laser for optical lithography
光リソグラフィー用の狭帯域F2レーザのスペクトル動特性
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TANAKA H
About TANAKA H
(Kyushu Univ., Fukuoka, JPN)
, About Kyushu Univ., Fukuoka, JPN
TAKAHASHI A
About TAKAHASHI A
(Kyushu Univ., Fukuoka, JPN)
, About Kyushu Univ., Fukuoka, JPN
OKADA T
About OKADA T
(Kyushu Univ., Fukuoka, JPN)
, About Kyushu Univ., Fukuoka, JPN
ARIGA T
About ARIGA T
(Komatsu Ltd.)
, About Komatsu Ltd.
NOHDOMI R
About NOHDOMI R
(Komatsu Ltd.)
, About Komatsu Ltd.
HOTTA K
About HOTTA K
(Ushio Inc.)
, About Ushio Inc.
MIZOGUCHI H
About MIZOGUCHI H
(Gigaphoton Inc.)
About Gigaphoton Inc.
Material：
Applied Physics. B. Lasers and Optics
(Applied Physics. B. Photo-physics and Chemistry)
About Applied Physics. B. Lasers and Optics
Volume： 76 Issue： 7 Page： 735-740 Publication year： Jul. 2003
JST Material Number： E0501B ISSN： 0946-2171 CODEN： APBOEM Document type： Article
Article type： 原著論文 Country of issue： Germany, Federal Republic of (DEU) Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*laser lithography
,...
About laser lithography
JST classification (1)：
JST classification
Category name(code) classified by JST.
Chemical lasers
Category name(code) classified by JST.
(BD04050P)
About Chemical lasers
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
光リソグラフィー
, About 光リソグラフィー
狭帯域
, About 狭帯域
F2レーザ
, About F2レーザ
スペクトル
, About スペクトル
動特性
About 動特性
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