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J-GLOBAL ID:200902219679820021   Reference number:08A0335291

Cr/Si傾斜カンチレバーとエラストマを用いた多軸触覚センサの作製と有限要素解析

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Material:
Volume: 2008  Issue:Page: 190  Publication year: Mar. 19, 2008 
JST Material Number: S0653A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Piezoelectric devices  ,  Design,manufacturing,and components of robots 

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