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J-GLOBAL ID:200902223764681160   Reference number:07A0487983

Measuring Separation Gap and Visualizing a Real Contact Area Using White Light Spacer Interferometry and HSV Color Space-Verification for Resolution of 3 nm Thickness-

白色スペーサ干渉法とHSV色空間を利用したすきま測定と真実接触部の可視化-分解能3nmの検証-
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Volume: 52  Issue:Page: 381-388  Publication year: May. 15, 2007 
JST Material Number: F0390A  ISSN: 0915-1168  CODEN: TORAEO  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Lubrication in general  ,  Interferometry and interferometers  ,  Measuring methods and instruments of length,area,cross section,volume,angle 

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