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J-GLOBAL ID：200902251662312260
Reference number：05A0908990 Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD
FIB-CVD法を用いて作製したDLCの機械的特性に対する熱処理効果
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SAKAMOTO Naomichi
About SAKAMOTO Naomichi
(Iwaki Meisei Univ., Iwaki, JPN)
, About Iwaki Meisei Univ., Iwaki, JPN
KOGO Yasuo
About KOGO Yasuo
(Tokyo Univ. Sci., Noda, JPN)
, About Tokyo Univ. Sci., Noda, JPN
YASUNO Takuya
About YASUNO Takuya
(Iwaki Meisei Univ., Iwaki, JPN)
, About Iwaki Meisei Univ., Iwaki, JPN
TANIGUCHI Jun
About TANIGUCHI Jun
(Tokyo Univ. Sci., Noda, JPN)
, About Tokyo Univ. Sci., Noda, JPN
MIYAMOTO Iwao
About MIYAMOTO Iwao
(Tokyo Univ. Sci., Noda, JPN)
About Tokyo Univ. Sci., Noda, JPN
Material：
JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)
(JSME International Journal. Series A. Mechanics and Material Engineering)
About JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)
Volume： 48 Issue： 4 Page： 275-279 Publication year： Oct. 15, 2005
JST Material Number： G0026B ISSN： 1344-7912 Document type： Article
Article type： 原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Carbon
,...
About Carbon
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
DLC(carbon)
About DLC(carbon)
JST classification (1)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds
Category name(code) classified by JST.
(YB02060D)
About Carbon and its compounds
Reference (19)：
- (1) Tsai, H. and Bogy, D.B., Characterization of Diamondlike Carbon Films and Their Application as Overcoats on Thin-Film Media for Magnetic Recording, J. Vac. Sci. Technol. A, Vol.5 (1987), pp.3287-3312.
- (2) Singh, B., McClelland, D., Tamas III, F., Halon, B., Mesker, O. and Furst, D., Use of Black Diamond-Like Carbon Films as a Contrast Enhancement Layer for Liquid-Crystal Displays, Appl. Phys. Lett., Vol.57 (1990), pp.2288-2290.
- (3) Gago, R., Jiménez, I., Albella, J., Climent-Font, A., Cáceres, D., Vergara, I., Banks, J.C., Doyle, B.L. and Terminello, L.J., Bonding and Hardness in Nonhydrogenated Carbon Films with Moderate sp3 Content, J. Appl. Phys., Vol.87 (2000), pp.8174-8180.
- (4) Qian, F., Singh, R.K., Dutta, S.K. and Pronko, P.P., Laser Deposition of Diamondlike Carbon Films at High Intensities, Appl. Phys. Lett., Vol.67 (1995), pp.3120-3122.
- (5) Samano, E.C., Sato, G., Olivas, A. and Cota, L., DLC Thin Films Characterized by AES, XPS and EELS, Appli. Surf. Sci., Vol.202 (2002), pp.1-7.
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
FIB-CVD
, About FIB-CVD
作製
, About 作製
DLC
, About DLC
機械的特性
, About 機械的特性
熱処理
About 熱処理
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