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J-GLOBAL ID：200902251662312260   Reference number：05A0908990

Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

FIB-CVD法を用いて作製したDLCの機械的特性に対する熱処理効果

Author (5)： SAKAMOTO Naomichi (Iwaki Meisei Univ., Iwaki, JPN) ,  KOGO Yasuo (Tokyo Univ. Sci., Noda, JPN) ,  YASUNO Takuya (Iwaki Meisei Univ., Iwaki, JPN) ,  TANIGUCHI Jun (Tokyo Univ. Sci., Noda, JPN) ,  MIYAMOTO Iwao (Tokyo Univ. Sci., Noda, JPN)
Material： JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)  (JSME International Journal. Series A. Mechanics and Material Engineering)
Volume： 48  Issue： 4  Page： 275-279  Publication year： Oct. 15, 2005 
JST Material Number： G0026B  ISSN： 1344-7912  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *Carbon ,...
Semi thesaurus term： DLC(carbon)

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JST classification (1)： Carbon and its compounds  (YB02060D)

Reference (19)：

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• (2) Singh, B., McClelland, D., Tamas III, F., Halon, B., Mesker, O. and Furst, D., Use of Black Diamond-Like Carbon Films as a Contrast Enhancement Layer for Liquid-Crystal Displays, Appl. Phys. Lett., Vol.57 (1990), pp.2288-2290.
• (3) Gago, R., Jiménez, I., Albella, J., Climent-Font, A., Cáceres, D., Vergara, I., Banks, J.C., Doyle, B.L. and Terminello, L.J., Bonding and Hardness in Nonhydrogenated Carbon Films with Moderate sp³ Content, J. Appl. Phys., Vol.87 (2000), pp.8174-8180.
• (4) Qian, F., Singh, R.K., Dutta, S.K. and Pronko, P.P., Laser Deposition of Diamondlike Carbon Films at High Intensities, Appl. Phys. Lett., Vol.67 (1995), pp.3120-3122.
• (5) Samano, E.C., Sato, G., Olivas, A. and Cota, L., DLC Thin Films Characterized by AES, XPS and EELS, Appli. Surf. Sci., Vol.202 (2002), pp.1-7.

Terms in the title (5)： FIB-CVD ,  作製 ,  DLC ,  機械的特性 ,  熱処理