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J-GLOBAL ID：200902253761471713
Reference number：04A0479244 ULSI配線用ダマシン銅めっきにおけるJGBの添加効果
NEGISHI YOSHINORI
About NEGISHI YOSHINORI
(早稲田大 理工)
, About 早稲田大 理工
HASEGAWA MADOKA
About HASEGAWA MADOKA
(早稲田大 理工)
, About 早稲田大 理工
YOKOSHIMA TOKIHIKO
About YOKOSHIMA TOKIHIKO
(早稲田大 理工)
, About 早稲田大 理工
NAKANISHI TAKUYA
About NAKANISHI TAKUYA
(早稲田大 理工)
, About 早稲田大 理工
OSAKA TETSUYA
About OSAKA TETSUYA
(早稲田大 理工)
About 早稲田大 理工
Material：
表面技術協会講演大会講演要旨集
About 表面技術協会講演大会講演要旨集
Volume： 109th Page： 154-155 Publication year： Mar. 08, 2004
JST Material Number： Y0050A ISSN： 0917-2947 Document type： Proceedings
Article type： 短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*VLSI
,...
About VLSI
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Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ダマシン銅めっき
About ダマシン銅めっき
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Category name(code) classified by JST.
(NC03030V)
About Manufacturing technology of solid-state devices
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Substance index
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Chemical Substance indexed to the Article.
Janus Green B
, About Janus Green B
Bis(3-sulfopropyl) persulfide
About Bis(3-sulfopropyl) persulfide
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
ULSI
, About ULSI
ダマシン
, About ダマシン
銅めっき
, About 銅めっき
添加効果
About 添加効果
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