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Art
J-GLOBAL ID：200902284682533099
Reference number：04A0343597 強誘電体をゲート絶縁膜に用いたITOチャネル薄膜トランジスタの作製と評価
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MIYASAKO TAKEAKI
About MIYASAKO TAKEAKI
(東京工大 精密工研)
, About 東京工大 精密工研
SENOO MASARU
About SENOO MASARU
(東京工大 精密工研)
, About 東京工大 精密工研
TOKUMITSU EISUKE
About TOKUMITSU EISUKE
(東京工大 精密工研)
About 東京工大 精密工研
Material：
応用物理学関係連合講演会講演予稿集
(Extended Abstracts. Spring Meeting. Japan Society of Applied Physics and Related Societies)
About 応用物理学関係連合講演会講演予稿集
Volume： 51st Issue： 2 Page： 650 Publication year： Mar. 28, 2004
JST Material Number： Y0054A Document type： Proceedings
Article type： 短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)
Thesaurus term：
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*thin film transistor
,...
About thin film transistor
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*PZT
,...
About PZT
JST classification (1)：
JST classification
Category name(code) classified by JST.
Transistors
Category name(code) classified by JST.
(NC03070N)
About Transistors
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
強誘電体
, About 強誘電体
ゲート絶縁膜
, About ゲート絶縁膜
ITO
, About ITO
チャネル
, About チャネル
薄膜トランジスタ
, About 薄膜トランジスタ
作製
, About 作製
評価
About 評価
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