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J-GLOBAL ID:201002243368844597   Reference number:10A0949994

Evaluation and Application of Resist for Alkaline Wet Etching

アルカリウェットエッチング用レジストの評価と応用
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Volume: 130  Issue:Page: 421-425 (J-STAGE)  Publication year: 2010 
JST Material Number: L3098A  ISSN: 1341-8939  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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