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J-GLOBAL ID:201102235267603216   Reference number:11A0608654

Development of Flat Microscope Stage Constructed of Electromagnetic Actuator

電磁アクチュエータを用いた顕微作業用薄型精密ステージの開発
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Volume: 46  Issue:Page: 170-173  Publication year: Mar. 05, 2011 
JST Material Number: S0898A  ISSN: 0919-2948  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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