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J-GLOBAL ID：201702243969815910   Reference number：17A1456425

Aspherical Lens Design Using Computational Lithography

計算リソグラフィーを用いた非球面レンズ設計【Powered by NICT】

Author (3)： Murakami Seiro (Department of Mechano-Micro Engineering, Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan) ,  Yanagida Yasuko (Laboratory for Interdisciplinary Research Laboratory and Technology (FIRST), Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan) ,  Hatsuzawa Takeshi (Laboratory for Interdisciplinary Research Laboratory and Technology (FIRST), Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan)
Material： Precision Engineering  (Precis Eng)
Volume： 50  Page： 372-379  Publication year： 2017 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Optical lithography is often a...

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Thesaurus term： photolithography ,  photomask ,  *lens (optics) ,  exposure (photography) ,  numerical aperture ,  three dimension ,  aberration ,  density distribution ,  Glass ,  focal depth ,  *aspherical lens ,  optical element ,  *aspheric surface ,  microlens array ,  mask

Author keywords (5)： 3D patterning ,  projection optics ,  micro-lens-array ,  aspherical lens design ,  computational lithography

JST classification (5)： Optical instrument elements and their materials  (QF05020K) ,  Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O) ,  Metrology in general  (AD01000Q) ,  Grinding  (QC03000R) ,  Optical information processing  (BD03060T)

Terms in the title (3)： 計算リソグラフィー ,  非球面レンズ ,  設計