Research field (2):
Nanomaterials
, Nano/micro-systems
Research keywords (7):
Microfabrication
, Sensor
, PowerMEMS
, Energy harvesting
, Piezoelectric thin films
, Piezoelectric devices
, MEMS
Research theme for competitive and other funds (3):
2021 - 2024 Study of multi focused ion beam using ion species generated from ion liquid
2020 - 2022 Ultra-high performance and environment-friendly micro-energy harvesters towards self-powered micro/nano-systems for the Internet of Things
2016 - 2020 Development of multi-focused ion beams for highly functional nano-dimension free processing
Papers (23):
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano. Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-January. 14-17
H. H. Nguyen, L. Van Minh, H. Oguchi, H. Kuwano. High figure of merit (MgHf) x Al1-x N thin films for miniaturizing vibrational energy harvesters. Journal of Physics: Conference Series. 2018. 1052. 012018
T. Takahashi, L. Van Minh, K. Umeda, T. Fujii, H. Kuwano. Fabrication and characterization of micromachined piezoelectric energy harvesters exploiting flexible Pb(Nb,Zr,Ti)O3/SUS. Journal of Physics: Conference Series. 2018. 1052. 012039
Piezoelectric Tantalum aluminum nitride grown on stainless steel for low-frequency vibration-driven energy harvesters
(The 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), USA 2022)
Piezoelectric wurtzite nitride thin films for green, high-performance MEMS applications
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
Vibration-driven micro energy harvesting with piezoelectric materials for IoTs and SDGs
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
EMIM-BF4 multi-ion sources of micromachined Si external wetted emitters with fluidic feeding-flow confinement: from microfabrication to Si etching evaluation
(The 69th Japanese Society of Applied Physics (JSAP) Spring Meeting 2022, Kanagawa, Japan 2022)
A micromachined ionic liquid ion source array
(The 3rd International Workshop on MEMS and Sensor System 2019 (IWMS 2019) 2019)
2010 - 2013 Tohoku University Graduate Schoool of Engineering Nanomechanics
2006 - 2008 Hanoi University of Technology International Training Institute for Materials Science Materials Science
2001 - 2006 Hanoi University of Technology Institute of Engineering Physics Engineering Physics - Electronic Materials
Work history (8):
2022/04 - 現在 Tohoku University New Industry Creation Hatchery Center Specially Appointed Associate Professor (Research)
2017/04 - 2022/03 Tohoku University New Industry Creation Hatchery Center Assistant Professor
2016/04 - 2017/03 Tohoku University Graduate School of Engineering, Department of Robotics Assistant Professor
2015/06 - 2016/03 Tohoku University Graduate School of Engineering, Department of Nanomechanics Assistant Professor
2014/10 - 2015/05 Tohoku University New Industry Creation Hatchery Center Researcher for Industry-Academic-Government Collaboration
2014/01 - 2014/09 Tohoku University New Industry Creation Hatchery Center Educational and Research Supporter Personnel
2013/10 - 2013/12 Tohoku University Graduate School of Engineering, Department of Nanomechanics Researcher for Industry-Academic-Government Collaboration
2006/07 - 2010/09 Hanoi University of Technology International Training Institute for Materials Science, MEMS group Research Assistant
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Awards (2):
2010/10 - Japanese Government (Monbukagakusho: MEXT) Japanese Government (Monbukagakusho: MEXT) Scholarship for PhD. Program (2010-2013)
2010 - The Vietnam Education Foundation (VEF) The Vietnam Education Foundation (VEF) Fellowship for Doctoral Course in the United States of America (Awarded list in 2010)
Association Membership(s) (4):
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society Membership
, IEEE Electron Devices Society Membership
, IEEE
, The Japan Society of Applied Physics (JSAP)