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J-GLOBAL ID:201802268666910817   Reference number:18A0505128

Moisture Barrier Properties of Capping Graphene for Copper Metallization

銅配線のためのグラフェンキャップ膜の耐湿バリア性
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Volume: 117  Issue: 429(SDM2017 97-103)  Page: 5-9  Publication year: Feb. 01, 2018 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor integrated circuit  ,  Manufacturing technology of solid-state devices 
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