About YOSHIZATO MIKITO
About HIRATA YUKI
About AKASAKA HIROKI
About OTAKE NAOTO
About 精密工学会大会学術講演会講演論文集
About boron nitride
About layer
About physical vapor deposition
About stability
About compound semiconductor
About band gap
About insulator
About solid state device
About chemical vapor deposition
About hazardous gas
About explosibility
About chemical synthesis
About magnetron sputtering
About annealing(heat treatment)
About substrate(plate)
About manufacturing
About post annealing method
About wide band gap
About wide band-gap semiconductor
About chemical vapor deposition
About chemical stability
About atomic layer
About synthetic method
About electron device
About copper board
About toxic gas
About thin film manufacturing
About hexagonal boron nitride
About Techniques and equipment of thin film deposition
About Thin films of other inorganic compounds
About Nitrogen and its compounds
About Insulating materials
About Techniques and equipment of crystal growth
About Crystal growth of other inorganic compounds
About Vapor plating
About Manufacturing technology of solid-state devices
About 物理気相成長法
About 窒化ホウ素
About 薄膜