Effect of selective ion acceleration with synchronized substrate bias on the stress reduction of diamond-like carbon films
(The 17th International Symposium on Sputtering & Plasma Processes 2024)
A study about mechanical properties of Diamond-like carbon films deposited by HiPIMS method
(The 17th International Symposium on Sputtering & Plasma Processes 2024)
Time resolved optical Emission Spectroscopy Study on HiPIMS Discharge of Carbon in Ar Atmosphere
(13th Asian-European International Conference on Plasma Surface Engineering 2023 2023)