Tetsuya Sato

サトウテツヤ | Tetsuya Sato

Affiliation and department：
Job title： Associate Professor
Homepage URL (1)： http://www.szr.yamanashi.ac.jp/research/intro_lab/intro_tsato_lab

Research field (7)： Green/sustainable/environmental chemistry , Composite materials and interfaces , Chemical reaction and process system engineering , Thin-film surfaces and interfaces , Semiconductors, optical and atomic physics , Applied plasma science , Basic physical chemistry

Research keywords (6)： Tunneling Reaction , Secondary Ion Mass Spectrometry , Thin Film , Plasma Chemistry , cryogenic , atoms and molecules

Papers (7)：

Yukio Fukuda, Daichi Yamada, Tomoya Yokohira, Kosei Yanachi, Chiaya Yamamoto, Byeonghak Yoo, Junji Yamanaka, Tetsuya Sato, Toshiyuki Takamatsu, Hiroshi Okamoto. Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2016. 34. 2
Tetsuji Arai. Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices. Journal of Materials Science and Chemical Engineering. 2016. 4. 29-33
Yukio Fukuda, Hiroki Ishizaki, Yohei Otani, Chiaya Yamamoto, Junji Yamanaka, Tetsuya Sato, Toshiyuki Takamatsu, Hiroshi Okamoto, Hidehumi Narita. Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen. APPLIED PHYSICS LETTERS. 2013. 102. 13. 132904-1-132904-4
Norihito Sogoshi, Shoji Sato, Hideaki Takashima, Tetsuya Sato, Kenzo Hiraoka. Synthesis of Polysilanes by Tunneling Reactions of H Atoms with Solid Si2H6 at 10 K. CHEMISTRY LETTERS. 2009. 38. 10. 986-987
T Sato, M Mitsui, J Yamanaka, K Nakagawa, Y Aoki, S Sato, C Miyata. Formation of microcrystal line silicon and SiNx films by electron-beam-induced-chemical vapor deposition at ultra low temperature. THIN SOLID FILMS. 2006. 508. 1-2. 61-64

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Patents (1)：

排気ガスの固定化処理法、及びその処理装置

Lectures and oral presentations (12)：

c-C4F8凝縮層への低速電子照射により銅基板上に低温形成した a-C:Fの物性評価
(2022年第69回応用物理学会春季学術講演会 2022)
c-C4F8/Si(CH3)4混合凝縮層の電子照射による a-SiC:Fの低温合成
(2022年第69回応用物理学会春季学術講演会 2022)
Fabrication and Characterization of Ge-based MIS structures
(240th ECS Meeting 2021)
Al(CH3)3凝縮層の酸素プラズマ照射によるAl2O3低温形成と物性評価
(第68回応用物理学会春季学術講演会 2021)
Synthesis of Super-hydrophobic PTFE Thin Films Using Electronic Excitation of c-C4F8 Condensed Gas
(The 16th Pacific Polymer Conference 2019)

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Professional career (2)：

Photodissociation Dynamics of Triatomic Molecules Studied by Laser and Mass Spectroscopic Techniques (東京農工大学)
博士(工学) (東京農工大学)

Work history (5)：

2018/04/01 - 2019/03/31 新潟大学理学部非常勤講師
2012/04/01 - 山梨大学大学院医学工学総合研究部准教授
2001/07/01 - 2012/03/31 山梨大学クリーンエネルギー研究センター助教授
1993/04/01 - 2001/06/30 山梨大学工学部助手
1991/04/01 - 1993/03/31 日本学術振興会特別研究員

Committee career (1)：

2019/04/01 - 2020/03/31 応用物理学会プラズマエレクトロニクス分科会幹事

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