Research field (2):
Optical engineering and photonics
, Thin-film surfaces and interfaces
Research keywords (4):
光導波路
, 表面物性
, 表面活性化
, 常温接合
Research theme for competitive and other funds (1):
2020 - 2023 Room temperature bonding of metal oxide films by surface activated bonding method
Papers (20):
Hideo Takeuchi, Yuto Omuku, Ryota Onoda, T. Nakaoka, Jun Utsumi, Shigeo Kawasaki, Masatoshi Koyama. Decay time extension of terahertz electromagnetic waves emitted from coherent longitudinal optical phonons in GaAs epitaxial layers with the use of fast atom bombardment. Optics Continuum. 2022
Cu/SiO2 Hybrid Bonding at Room Temperature by Surface Activated Bonding Method Using Si Ultrathin Films
(25th Symposium on“Microjoining and Assembly Technology in Electronics” 2019)
Direct Bonding of Oxide Materials and Si at Room Temperature Using Self-sputtered Bonding Method
(The 35th SENSOR SYMPOSIUM 2018)