Maskless Pattern Formation Which Used Alkaline Etching and Nano-scale Cutting by Using Friction Force Microscope.

CHEN L; MORITA NOBORU; ASHIDA KIWAMU

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J-GLOBAL ID：200902121950845973 Reference number：00A1054765

Maskless Pattern Formation Which Used Alkaline Etching and Nano-scale Cutting by Using Friction Force Microscope.

摩擦力顕微鏡機構による極微細加工とアルカリエッチングを併用した単結晶シリコンヘのマスクレスパターン形成

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Material：
Volume： 66 Issue： 11 Page： 1807-1811 Publication year： Nov. 05, 2000
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Manufacturing technology of solid-state devices

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