Art
J-GLOBAL ID：200902164362454322   Reference number：96A0263380

Ionized Cluster Beam Technology for Material Science.

クラスターイオンビームと材料科学
Author (1)：
TAKAGI TOSHINORI

About TAKAGI TOSHINORI

(イオン工学研)

About イオン工学研


Material：
表面科学  (JSSSJ)

About 表面科学


Volume： 17  Issue： 2  Page： 81-89  Publication year： Feb. 1996 
JST Material Number： F0940B  ISSN： 0388-5321  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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ion beam deposition

About ion beam deposition

,...
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Thesaurus term/Semi thesaurus term
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ion effect

About ion effect


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Reference (48)：
  • 高木俊宜. 応用物理. 1984, 53, 695
  • 高木俊宜. 応用物理. 1982, 51, 1070
  • TAKAGI, T. Thin Solid Films. 1982, 92
  • 高木俊宜. 日経エレクトロニクス. 1981, 279, 188
  • 高木俊宜. 化学と工業. 1982, 35, 848
ｍore...
Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
クラスターイオンビーム

About クラスターイオンビーム

, 
材料科学

About 材料科学


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