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J-GLOBAL ID：200902195127829214   Reference number：99A0266342

Improvement of E-Beam Observability by Testing-Pad Placement in LSI Design Layout.

LSI設計レイアウト中のテストパッド配置によるEビーム可観測性の改良

Author (2)： KUJI N (NTT System Electronics Lab., Atsugi-shi, JPN) ,  TAKEDA T (NTT System Electronics Lab., Atsugi-shi, JPN)
Material： IEICE Transactions on Electronics (Institute of Electronics, Information and Communication Engineers)  (IEICE Trans Electron (Inst Electron Inf Commun Eng))
Volume： E82-C  Issue： 2  Page： 387-392  Publication year： Feb. 1999 
JST Material Number： L1370A  ISSN： 0916-8524  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： observability ,...

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JST classification (2)： General  (NC03161C) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (8)：

• MURASE, M. Advanced LSI failure analysis and its limitation. IEICE.Technical Report
• INO, M. LSI applications of 0.25-μm CMOS/SIMOX technology. Proc. ISDM '96
• KUJI, N. Electron beam testing in the quartermicron technology era. Proc. 1996 Electronics Society Conference of IEICE
• KUJI, N. Automated placement of testing pads for electron-beam observation. Proc. 8th European Symposium on Reliability of Electron Devices
• MORIMOTO, Y. H. Anew VLSI diagnosis technique: Focused ion beam assisted multi-level circuit pronbing. Reliability Physics 25th Annual Proceedings

Terms in the title (6)： LSI設計 ,  レイアウト ,  テスト ,  パッド ,  ビーム ,  可観測性